A cikin 2020, an samar da guntu fiye da tiriliyan ɗaya a duk duniya, wanda yayi daidai da guntu 130 mallakar kowane mutum a duniya kuma yayi amfani da shi.Duk da haka duk da haka, ƙarancin guntu na baya-bayan nan yana ci gaba da nuna cewa har yanzu wannan adadin bai kai ga babba ba.
Ko da yake ana iya samar da kwakwalwan kwamfuta a kan irin wannan babban sikelin, samar da su ba abu ne mai sauƙi ba.Tsarin masana'anta kwakwalwan kwamfuta yana da rikitarwa, kuma a yau za mu rufe matakai shida mafi mahimmanci: jigo, murfin hoto, lithography, etching, ion implantation, da marufi.
Zubar da ciki
Matakin ƙaddamarwa yana farawa da wafer, wanda aka yanke daga silinda mai tsabta na 99.99% (wanda ake kira "silicon ingot") kuma an goge shi zuwa kyakkyawan ƙarewa, sannan an adana fim na bakin ciki na madugu, insulator, ko kayan semiconductor. a kan wafer, dangane da buƙatun tsarin, don a iya buga Layer na farko akan shi.Ana kiran wannan muhimmin mataki akai-akai a matsayin "ajiye".
Yayin da kwakwalwan kwamfuta ke zama ƙarami da ƙarami, ƙirar bugu akan wafers ya zama mai rikitarwa.Ci gaba a cikin sakawa, etching da lithography sune mabuɗin don yin guntu har abada ƙarami kuma ta haka ne ke haifar da ci gaba da Dokar Moore.Wannan ya haɗa da sabbin fasahohi waɗanda ke amfani da sabbin kayan aiki don sa tsarin jibgewa ya zama daidai.
Rufin Photoresist
Ana lulluɓe wafers da wani abu mai ɗaukar hoto mai suna "photoresist" (wanda ake kira "photoresist").Akwai nau'ikan hotuna guda biyu - "photoresists masu kyau" da "marasa hotuna masu kyau".
Babban bambanci tsakanin tabbatacce da korau photoresists shine tsarin sinadarai na kayan da kuma yadda photoresist ke amsawa ga haske.A cikin yanayin tabbataccen hoto, yankin da aka fallasa zuwa hasken UV yana canza tsarin kuma ya zama mai narkewa, don haka shirya shi don etching da sakawa.Korau photoresists, a gefe guda, polymerize a cikin wuraren da aka fallasa zuwa haske, wanda ya sa su fi wuya a narke.Ingantattun photoresists sune mafi amfani da su a masana'antar semiconductor saboda suna iya cimma ƙuduri mafi girma, yana sa su zama mafi kyawun zaɓi don matakin lithography.Yanzu akwai kamfanoni da yawa a duk duniya waɗanda ke samar da masu ɗaukar hoto don masana'antar semiconductor.
Hoton hoto
Photolithography yana da mahimmanci a cikin tsarin kera guntu saboda yana ƙayyade yadda ƙananan transistor akan guntu zai iya zama.A wannan mataki, ana sanya wafers a cikin na'urar daukar hoto kuma an fallasa su zuwa hasken ultraviolet mai zurfi.Sau da yawa sun fi ƙanƙanta sau dubbai fiye da yashi.
Ana hasashe haske akan wafer ta hanyar "farantin abin rufe fuska" kuma na'urar gani ta lithography (lens na tsarin DUV) yana raguwa kuma yana mai da hankali kan tsarin da'irar da aka ƙera akan farantin abin rufe fuska akan mai ɗaukar hoto akan wafer.Kamar yadda aka bayyana a baya, lokacin da hasken ya bugi photoresist, wani canjin sinadari yana faruwa wanda ke buga ƙirar akan farantin abin rufe fuska akan murfin hoto.
Samun tsarin da aka fallasa daidai daidai aiki ne mai wahala, tare da tsangwama ga barbashi, jujjuyawa da sauran lahani na zahiri ko sunadarai duk mai yuwuwa a cikin tsari.Shi ya sa wani lokacin muna buƙatar haɓaka ƙirar bayyanar ta ƙarshe ta musamman gyara ƙirar akan abin rufe fuska don sanya ƙirar da aka buga ta yi kama da yadda muke so.Tsarin mu yana amfani da "lithography na lissafi" don haɗa nau'ikan algorithmic tare da bayanai daga injin lithography da gwajin wafer don samar da ƙirar abin rufe fuska wanda ya bambanta da tsarin bayyanar ƙarshe, amma abin da muke son cimma ke nan domin ita ce kaɗai hanyar samun tsarin bayyanar da ake so.
Etching
Mataki na gaba shine cire ɓataccen hoton hoto don bayyana tsarin da ake so.Yayin aiwatar da “etch”, ana toya wafer ɗin kuma ana haɓakawa, kuma ana wanke wasu daga cikin masu ɗaukar hoto don bayyana tsarin buɗe tashar 3D.Tsarin etching dole ne ya samar da sifofin gudanarwa daidai kuma a kai a kai ba tare da lalata gabaɗayan mutunci da kwanciyar hankali na tsarin guntu ba.Dabarun etching na ci gaba suna ƙyale masana'antun guntu su yi amfani da nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan nau'ikan sinadarai biyu suna ba da damar yin amfani da guntu na zamani.
Kamar photoresists, etching ya kasu kashi "bushe" da "rigar" iri.Dry etching yana amfani da iskar gas don ayyana yanayin fallasa akan wafer.Wet etching yana amfani da hanyoyin sinadarai don tsaftace wafer.
Guntu tana da yadudduka da yawa, don haka dole ne a sarrafa etching a hankali don guje wa lalata tushen tsarin guntu mai yawan Layer.Idan manufar etching shine ƙirƙirar rami a cikin tsarin, ya zama dole don tabbatar da cewa zurfin rami daidai yake.Wasu ƙirar guntu tare da har zuwa yadudduka 175, kamar 3D NAND, suna sanya matakin etching musamman mahimmanci da wahala.
Ion allura
Da zarar an lissafta ƙirar a kan wafer, ana sanya wafer ɗin tare da ions masu kyau ko mara kyau don daidaita abubuwan gudanarwa na ɓangaren ƙirar.A matsayin kayan wafers, siliki mai ɗanɗano ba cikakkiyar insulator ba ce kuma ba cikakkiyar jagora ba.Silicon's conductive Properties sun faɗi wani wuri a tsakani.
Gudanar da ions da aka caje cikin siliki crystal ta yadda za a iya sarrafa kwararar wutar lantarki don ƙirƙirar na'urorin lantarki waɗanda su ne ainihin tubalan ginin guntu, transistor, ana kiranta "ionization", kuma aka sani da "ion implantation".Bayan da Layer aka ionized, sauran photoresist da ake amfani da su don kare wurin da ba a yi ba za a cire.
Marufi
Ana buƙatar dubunnan matakai don ƙirƙirar guntu a kan wafer, kuma yana ɗaukar fiye da watanni uku don tafiya daga ƙira zuwa samarwa.Don cire guntu daga wafer, an yanke shi cikin kwakwalwan kwamfuta guda ɗaya ta amfani da zato na lu'u-lu'u.Wadannan kwakwalwan kwamfuta, da ake kira "bare die," an raba su daga wafer mai inci 12, mafi yawan girman da ake amfani da su a masana'antar semiconductor, kuma saboda girman kwakwalwan ya bambanta, wasu wafers na iya ƙunsar dubban kwakwalwan kwamfuta, yayin da wasu sun ƙunshi kaɗan kawai. dozin.
Ana sanya waɗannan wafers ɗin da ba a so a kan "substrate" - abin da ke amfani da foil na ƙarfe don jagorantar shigarwa da siginar fitarwa daga wafer ɗin zuwa sauran tsarin.Sannan an rufe shi da “kwanciyar zafi”, ƙaramin kwandon kariya na ƙarfe mai lebur mai ɗauke da abin sanyaya don tabbatar da cewa guntu ya yi sanyi yayin aiki.
Bayanin Kamfanin
Zhejiang NeoDen Technology Co., Ltd. yana kera da fitar da kananan injunan karba da wuri daban-daban tun daga 2010. Yin amfani da fa'idodin R&D masu arziƙin namu, samar da ingantaccen horarwa, NeoDen ya sami babban suna daga abokan cinikin duniya.
tare da kasancewar duniya a cikin ƙasashe sama da 130, kyakkyawan aiki, babban daidaito da amincin NeoDenInjin PNPsanya su cikakke don R&D, ƙwararrun samfuri da ƙananan zuwa matsakaicin tsari.Muna ba da mafita na ƙwararrun kayan aikin SMT tasha ɗaya.
Ƙara: No.18, Tianzihu Avenue, Garin Tianzihu, gundumar Anji, birnin Huzhou, lardin Zhejiang, Sin
Waya: 86-571-26266266
Lokacin aikawa: Afrilu-24-2022